一类静电驱动微结构谐振传感器的吸合不稳定性研究及控制

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振动与冲击 ›› 2013, Vol. 32 ›› Issue (15) : 8-13.

论文

一类静电驱动微结构谐振传感器的吸合不稳定性研究及控制

尚慧琳1 文永蓬2

作者信息 +

Pull-in Stability of an Electrostatically ActuatedMEMS Resonant Sensor and Its Control

Huilin Shang1 Yongpeng Wen2

Author information +

文章历史 +

摘要

本文以一类静电驱动微结构谐振传感器为研究对象，基于安全域思想研究了系统直流偏置电压和交流激
励电压幅值引起的结构吸合不稳定现象。运用Melnikov函数法得到引起微结构吸合不稳定的系统参数门槛值，且运用四
阶Rung-Kutta方法和点映射方法数值地验证了交流电压幅值对系统的吸合区域的影响规律.结果表明,直流偏置电压的增
大均易引起微结构的吸合效应，而交流电压幅值的增大则会导致微结构的吸合不稳定。通过实施时滞位移反馈控制来抑
制系统的吸合不稳定，数值结果验证了该控制方法的有效性。本文在静电驱动微机电系统的设计领域存在潜在的应用价
值。

Abstract

A model of electrostatically actuated MEMS resonant sensor is considered in this paper. Basing on the
theory of safe basin, we discuss dynamical pull-in instability caused by dc bias voltage and the amplitude of ac voltage in
detail. The threshold of the system parameters of the dynamical pull in is obtained by the Melnikov method. The 4th
Runge-Kutta and the point mapping methods are employed numerically to verify the effect of the amplitude of ac voltage
on the basin of attraction of pull in of the system. It is found that the increasing of dc bias voltage may cause the pull-in
phenomena, and the increasing of ac voltage may induce pull-in instability of the structure. Then the delayed position
feedback is applied to reduce the pull-in instability. The numerical results verify the effectiveness of the control approach.The paper provides some potential applications for the design of electrostatically actuated resonant MEMS sensors．

导出引用

尚慧琳文永蓬. 一类静电驱动微结构谐振传感器的吸合不稳定性研究及控制[J]. 振动与冲击, 2013, 32(15): 8-13

Huilin Shang Yongpeng Wen. Pull-in Stability of an Electrostatically ActuatedMEMS Resonant Sensor and Its Control[J]. Journal of Vibration and Shock, 2013, 32(15): 8-13