静电驱动裂纹微悬臂梁结构振动特性分析

刘素娟;齐书浩;张文明

振动与冲击 ›› 2013, Vol. 32 ›› Issue (17) : 41-45.

PDF(1588 KB)
PDF(1588 KB)
振动与冲击 ›› 2013, Vol. 32 ›› Issue (17) : 41-45.
论文

静电驱动裂纹微悬臂梁结构振动特性分析

  • 刘素娟,齐书浩,张文明
作者信息 +

Vibration analysis of a cracked micro-cantilever beam under electrostatic excitation

  • Liu Sujuan, Qi Shuhao, Zhang Wenming,
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摘要

基于Euler-Bernoulli理论,提出了非线性静电力和压膜阻尼效应下裂纹微悬臂梁的动力学模型与分析方法,研究了耦合作用下裂纹微悬臂梁结构的振动特性。模型中裂纹采用转动弹簧模拟,该模型引起位移一阶导数不连续,不连续度与二阶导数成比例。结果表明,裂纹位置、裂纹开裂程度、非线性静电力以及非线性压膜阻尼效应对裂纹微悬臂梁结构的振动特性都有着较大影响。研究结果可用于微器件的设计、性能改进及健康检测。

Abstract

Based on Euler-Bernoulli theory, the dynamics model and analysis method of a cracked micro-cantilever beam under the coupling action of nonlinear electrostatic force and squeeze film damping effect is proposed. The dynamics behavior of a cracked micro-cantilever beam structure is studied under the coupling action of nonlinear electrostatic force and squeeze film damping effect. The cracked beam model is established using the classical cracked beam theory consisting of dividing the cracked element into two segments connected by a rotational spring located at the cracked section. This model promotes a discontinuity in bending slope, which is proportional to the second derivative of the displacements. Results indicate that crack position and severity, nonlinear electrostatic force and squeeze film damping have important effects on the vibration performance of the beam structure. This study may be of interest for the design, performance improvement, and health monitoring of micro-devices.

关键词

微悬臂梁 / 静电驱动 / 裂纹 / 振动分析

Key words

micro-cantilever beam / electrostatic actuation / crack / vibration analysis

引用本文

导出引用
刘素娟;齐书浩;张文明 . 静电驱动裂纹微悬臂梁结构振动特性分析[J]. 振动与冲击, 2013, 32(17): 41-45
Liu Sujuan;Qi Shuhao;Zhang Wenming;. Vibration analysis of a cracked micro-cantilever beam under electrostatic excitation[J]. Journal of Vibration and Shock, 2013, 32(17): 41-45

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