一种新型三维多方向敏感的非硅微机械惯性开关

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振动与冲击 ›› 2013, Vol. 32 ›› Issue (5) : 104-107.

论文

一种新型三维多方向敏感的非硅微机械惯性开关

朱斌，杨卓青，陈文国, 丁桂甫，赵小林

作者信息 +

A novel multidirectional-sensitive MEMS inertial switch by non-silicon surface micromachining

ZHU Bin, YANG Zhuo-qing, CHEN Wen-guo, DING Gui-fu, ZHAO Xiao-lin

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文章历史 +

摘要

基于非硅表面微加工技术，设计并制造一种新型三维多方向敏感的微惯性开关。选用弹簧-质量块-阻尼的典型碰撞结构，主要由可动电极悬臂梁弹簧—质量块系统、水平固定电极、垂直复合柔性固定电极三部分组成。利用ANSYS有限元软件对器件进行模态和动力学碰撞仿真分析，并对该微机械惯性开关进行落锤冲击试验，结果表明，在水平和竖直方向的阈值均为 50~60g，接触时间可稳定在40 s以上。

Abstract

Based on non-silicon surface micromachining technology, a new novel three-dimension micro inertial switch with multidirectional-sensitive has been designed and fabricated. Using typical mass spring damper system, the switch mainly consists of mobile electrode (mass) with beam spring, flexible fixed planar and vertical electrodes. By finite element analysis (FEA) simulation, modal analysis of the device has been using to determine the natural frequency of the device; dynamic simulation of the device to verify the working principle. After fabrication, micro-switches are tested by using drop weight. The results show that the threshold accelerations distribute between 50g and 60g, which basically fulfils the expected 60g; and the response time to 1ms half-sine waved shock is above 40 s.

导出引用

朱斌;杨卓青;陈文国;丁桂甫;赵小林&#;. 一种新型三维多方向敏感的非硅微机械惯性开关[J]. 振动与冲击, 2013, 32(5): 104-107

ZHU Bin;YANG Zhuo-qing;CHEN Wen-guo;DING Gui-fu;ZHAO Xiao-lin. A novel multidirectional-sensitive MEMS inertial switch by non-silicon surface micromachining[J]. Journal of Vibration and Shock, 2013, 32(5): 104-107