The working performance of smart actuators is affected by the hysteretic effect nonlinearity. Thus, it is necessary to identify and compensate the hysteresis nonlinearity to achieve precision motion. At first, based on the singular value decomposition (SVD) method, the parameters of the Preisach model are identified using the de-signed harmonic input signals with varying amplitudes to satisfy PE condition. Then, based on the identified Preisach model, the mode-inversion feedforward is designed to compensate the hysteresis nonlinearity. Finally, the piezoelectric stage is used to validate the proposed identification and compensation methods. The experimental re-sults indicate that the hysteresis nonlinearity has been identified using the SVD method, the tracking error has been reduced by 89.5% using the model-inversion compensator. The proposed identification and compensation ap-proaches have been verified.