基于机器视觉的数字式角振动传感器动态校准方法

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振动与冲击 ›› 2023, Vol. 42 ›› Issue (13) : 177-182.

论文

刘文峰1，杨明1，蔡晨光2，刘志华2，杨靖1

作者信息 +

Dynamic calibration method of digital angular vibration sensor based on machine vision

LIU Wenfeng1, YANG Ming1, CAI Chenguang2, LIU Zhihua2, YANG Jing1

Author information +

文章历史 +

摘要

低频角振动传感器在惯性导航、姿态估计及精密控制等领域具有广泛应用，其灵敏度校准精度是决定应用系统性能的关键。激光干涉法与圆光栅法是最为常用的两种校准方法，然而前者需要昂贵与复杂的系统，后者的校准频率范围与应用场景有限，难以满足日益增长的高性能角振动传感器校准需求。通过采用具有亚像素级边缘提取精度的机器视觉法准确地测量低频角振动传感器的输入角激励，以实现宽低频范围的灵敏度可靠校准，同时保证校准精度与效率。与激光干涉法及圆光栅法的对比实验表明，机器视觉法与激光干涉法及圆光栅法在0.01~5 Hz范围内具有相似的校准结果，最大相对偏差分别约为0.6%和0.4%。此外，整个频率范围内，机器视觉法校准的最大灵敏度相对标准差约为0.5%。

Abstract

Low-frequency angular vibration sensors are widely used in the applications of inertial navigation, attitude estimation, precision control, and their sensitivity calibration accuracy are the key to determine the performance of these applications. At present, the most commonly used calibration methods are the laser interferometry and circular grating method. However, the former usually needs an expensive and complex system, and the latter only has the limited calibration frequency range and application scope, they are difficult to meet the increasing calibration demand of high-performance angular vibration sensors. The machine vision method with sub-pixel edge extraction accuracy is adopted to accurately measure the input angular excitation of low-frequency angular vibration sensors so as to achieve the reliable sensitivity calibration in a wide low-frequency range, which can ensure the accuracy and efficiency simultaneously. Compared with the laser interferometry and circular grating method, the machine vision has the similar calibration results with the laser interferometry and circular grating method in the range of 0.01-5 Hz, and their maximum relative deviations are about 0.6% and 0.4%, respectively. In addition, the maximum relative standard deviation of the calibrated sensitivity by the machine vision method in this whole range is about 0.5%.

导出引用

刘文峰1，杨明1，蔡晨光2，刘志华2，杨靖1. 基于机器视觉的数字式角振动传感器动态校准方法[J]. 振动与冲击, 2023, 42(13): 177-182

LIU Wenfeng1, YANG Ming1, CAI Chenguang2, LIU Zhihua2, YANG Jing1. Dynamic calibration method of digital angular vibration sensor based on machine vision[J]. Journal of Vibration and Shock, 2023, 42(13): 177-182

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