Si3N4陶瓷纵扭超声磨削表面残余应力及其试验研究

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振动与冲击 ›› 2023, Vol. 42 ›› Issue (23) : 95-102.

论文

闫艳燕，秦飞跃，张亚飞，马千里，王晓博

作者信息 +

Test study on surface residual stress of Si3N4 ceramic using LTUVAG

YAN Yanyan,QIN Feiyue,ZHANG Yafei,MA Qianli,WANG Xiaobo

Author information +

文章历史 +

摘要

Si3N4陶瓷属于典型的硬脆材料，已加工表面易产生微裂纹，对陶瓷零件的使用性能影响较大。为了获取高性能的Si3N4陶瓷零件，纵扭超声磨削被应用于其超精密加工中。为了揭示纵扭超声振动磨削对Si3N4陶瓷零件独特的加工机理，建立了纵扭超声磨削单颗磨粒切削轨迹方程及其磨削表面残余应力模型，并进行了Si3N4陶瓷纵扭超声磨削试验验证。结果表明：相同加工工艺参数下，普通磨削Si3N4陶瓷表面残余应力多为拉应力，而纵扭超声磨削Si3N4陶瓷表面多为残余压应力，进而纵扭超声磨削Si3N4陶瓷亚表面损伤深度比普通磨削最大可降低38%，且其理论仿真结果与试验结果误差不超过10%，可为Si3N4陶瓷高性能零件的超精密加工提供新的加工方法。

Abstract

Si3N4 ceramic is a typical hard and brittle material, so it is easy to produce microcracks on the machined surface, which has a great impact on the service performance of ceramic parts. In order to obtain high-performance Si3N4 ceramic parts, longitudinal-torsional ultrasonic vibration assisted grinding(LTUVAG) is applied in its ultra-precision machining. The cutting trajectory equation of single abrasive grain during LTUVAG and the residual stress model of its machined surface were established to reveal the unique machining mechanism of LTUVAG for Si3N4 ceramic parts, and the longitudinal-torsional ultrasonic grinding test of Si3N4 ceramic was carried out to verify the theoretical model. The results show that, under the same processing parameters, the residual stress on the machined surface of Si3N4 ceramic under general grinding is mostly tensile stress, while the residual compressive stress on the surface of Si3N4 ceramic under LTUVAG is mostly residual stress, and the sub-surface damage depth of Si3N4 ceramic under LTUVAG can be reduced by up to 38% compared with that under general grinding, and the error between the theoretical simulation results and the experimental results is not more than 10%. As a result, LTUVAG can provide an effective machining method for ultra-precision machining of high performance Si3N4 ceramic parts.

导出引用

闫艳燕，秦飞跃，张亚飞，马千里，王晓博. Si3N4陶瓷纵扭超声磨削表面残余应力及其试验研究[J]. 振动与冲击, 2023, 42(23): 95-102

YAN Yanyan,QIN Feiyue,ZHANG Yafei,MA Qianli,WANG Xiaobo. Test study on surface residual stress of Si3N4 ceramic using LTUVAG[J]. Journal of Vibration and Shock, 2023, 42(23): 95-102

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