磁悬浮分子泵具有工作转速高、转子极转动惯量大等特点，针对磁悬浮分子泵转子在升速过程中出现的弯曲模态振动以及涡动模态振动，提出了一种基于滤波交叉反馈与陷波器的大转动惯量磁悬浮转子控制方法。建立磁悬浮轴承-大转动惯量刚性转子系统数学模型，求解得出转子涡动模态频率，根据该模型分析了滤波交叉反馈控制器对涡动模态振动的抑制效果，并且设计了陷波器用于抑制不同转速下的转子弯曲模态振动。实验结果表明，磁悬浮分子泵稳定升速至工作转速18000rpm，转子振动位移为35μm，弯曲模态振动以及涡动模态振动得到了有效抑制。
Abstract
The magnetic levitation molecular pump has the characteristics of high working speed and large rotor pole rotational inertia. A new control method based on filtered cross-feedback and notch filter is proposed for the bending mode vibration and cone-motion mode vibration of the large inertia rotor of the magnetic levitation molecular pump during the speed-up process.The mathematical model of the magnetic bearing and the large inertia rigid rotor system is established, and the frequency of cone-motion mode vibration of the rotor is obtained. According to the model, the suppression effect of the filtered cross-feedback controller on the cone-motion mode vibration is analyzed, and a notch filter is designed to suppress the bending modal vibration of the rotor at different speeds. The experimental results show that the magnetic levitation molecular pump is stably increased to the working speed of 18000rpm, the vibration displacement of rotor is 35μm, and the bending mode vibration and the cone-motion mode vibration are effectively suppressed.
关键词
磁悬浮分子泵 /
交叉反馈控制 /
陷波滤波器 /
振动抑制
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Key words
magnetic levitation molecular pump /
filtered cross-feedback /
notch filter /
vibration suppression
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