空间敏感载荷用超精密驱动系统刚柔耦合振动分析

孙小庆，杨斌堂，柏转，忽伟

Rigid-flexible coupled vibration analysis of ultra-precision drive system for space sensitive load

SUN Xiaoqing, YANG Bintang, BAI Zhuan, HU Wei

振动与冲击 . 2021, (17): 99 -105 .