摇摆质量增强压电体声波固体波动圆盘微陀螺
张 弓;张卫平;许仲兴;汪濙海;成宇翔;唐健;关冉;陈文元
Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement
ZHANG Gong ;ZHANG Wei-ping;XU Zhong-xing;WANG Ying-hai;CHENG Yu-xiang;TANG Jian;GUAN Ran;CHEN Wenyuan
.
2014, (19): 104
-108
.
