一类静电驱动双边电容型微谐振器振动系统的复杂动力学特性研究

尚慧琳 1,胡立力 1，文永蓬 2

Complex dynamics of the vibrating system of a micro mechanical resonator with electrostatic forces on both sides

SHANG Huilin1,HU Lili1,WEN Yongpeng2

振动与冲击 . 2018, (24): 18 -23 .