静电力非线性对双检测微陀螺谐振频率及灵敏度稳定性的影响
郝淑英1,2,3，李伟雄1,2,3，李会杰1,2,3，张琪昌4,5，冯晶晶1,2,3，张昆鹏1,2,3
Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopes
HAO Shuying1,2,3,LI Weixiong1,2,3,LI Huijie1,2,3,ZHANG Qichang4,5,FENG Jingjing1,2,3,ZHANG Kunpeng1,2,3
振动与冲击
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2020, (8): 136
-142
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