微机电数字地震检波器设计及误差标定补偿方法

杜 敏;李巧燕;徐国栋

振动与冲击 ›› 2013, Vol. 32 ›› Issue (9) : 84-89.

PDF(1671 KB)
PDF(1671 KB)
振动与冲击 ›› 2013, Vol. 32 ›› Issue (9) : 84-89.
论文

微机电数字地震检波器设计及误差标定补偿方法

  • 杜 敏1,2,李巧燕1,徐国栋1
作者信息 +

Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone

  • DU Min 1,2,LI Qiao-yan 1,XU Guo-dong 1
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文章历史 +

摘要

研制一种新型数字硅MEMS地震检波器,集成三支硅MEMS陀螺与加速度计,可提供三维加速度、速度、角速度及位移等振动信息,可提高检波器的信息量及效率;提出的基于无需指北单轴速率转台的硅MEMS地震检波器六位置正反速率标定方法,不仅可提高标定精度与效率,且可减小标定工作量。并经实验验证该数字硅MEMS地震检波器样机及标定补偿方法的可行性与适用性。

Abstract

A new-type seismic geophone, which integrating three MEMS accelerations and gyroscopes, is developed. It can provide linear acceleration, linear velocity, angular velocity, vibration displacement, and has greatly improved performance and efficiency. A new six-position rotation calibration scheme for the digital geophone is proposed which utilizes only a single axis turn-table without north reference. The experiment results show that the proposed method has improved the measurement precision, and verifies validity of the silicon MEMS geophone.

关键词

微机电系统 / 地震检波器 / 加速度计 / 陀螺 / 误差标定

Key words

micro electro-mechanical system / geophone / accelerometer / gyroscope / error calibration

引用本文

导出引用
杜 敏;李巧燕;徐国栋. 微机电数字地震检波器设计及误差标定补偿方法[J]. 振动与冲击, 2013, 32(9): 84-89
DU Min;LI Qiao-yan;XU Guo-dong . Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone[J]. Journal of Vibration and Shock, 2013, 32(9): 84-89

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