原子力显微镜动力学简化模型的振动参数探讨

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振动与冲击 ›› 2023, Vol. 42 ›› Issue (6) : 240-247.

论文

宾凤姣，关睿，刘国林，曾瑜，魏征

作者信息 +

Discussion on vibration parameters of the simplified dynamic model of an atomic force microscope

BIN Fengjiao, GUAN Rui, LIU Guolin, ZENG Yu, WEI Zheng

Author information +

文章历史 +

摘要

欧拉-伯努利梁模型和一维弹簧振子模型是原子力显微镜（Atomic Force Microscopy，AFM）的动力学理论基础。文章提出了计算等效阻尼的新方法，并分别用挠曲线函数和一阶振型函数两种简化方式计算了由欧拉-伯努利梁模型简化为一维弹簧振子模型的等效质量、等效刚度和等效阻尼，并对两种简化方式进行了比较。在各项参数等效的基础上，进一步对固定端位移激励下悬臂梁的响应振幅进行了探讨。最后设计了无针尖探针远离样品处的扫频实验，实验表明用一阶振型函数简化所得的理论结果和实验吻合较好。该结果为原子力显微镜的动力学特性研究提供了理论参考。

Abstract

Euler-Bernoulli beam model and one-dimensional spring oscillator model are the dynamic theoretical basis of atomic force microscope (AFM). In this paper, a new method for calculating the equivalent damping was proposed, and the equivalent mass, equivalent stiffness and equivalent damping simplified from Euler-Bernoulli beam model to one-dimensional spring vibrator model were calculated using two simplified methods: deflection curve function and first-order vibration mode function, and the two simplified methods were compared. On the basis of equivalent parameters, the response amplitude of cantilever beam excited with fixed end displacement was further discussed. Finally, the frequency sweep experiment of the needle free probe away from the sample was designed. The experimental results show that the theoretical results obtained by simplifying the first-order mode function are in good agreement with the experiment. The results provide a theoretical reference for the study of the kinetic properties of atomic force microscope.

导出引用

宾凤姣，关睿，刘国林，曾瑜，魏征. 原子力显微镜动力学简化模型的振动参数探讨[J]. 振动与冲击, 2023, 42(6): 240-247

BIN Fengjiao, GUAN Rui, LIU Guolin, ZENG Yu, WEI Zheng. Discussion on vibration parameters of the simplified dynamic model of an atomic force microscope[J]. Journal of Vibration and Shock, 2023, 42(6): 240-247

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