Pull-in Stability of an Electrostatically ActuatedMEMS Resonant Sensor and Its Control

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Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (15) : 8-13.

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Pull-in Stability of an Electrostatically ActuatedMEMS Resonant Sensor and Its Control

Huilin Shang1 Yongpeng Wen2

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Abstract

A model of electrostatically actuated MEMS resonant sensor is considered in this paper. Basing on the
theory of safe basin, we discuss dynamical pull-in instability caused by dc bias voltage and the amplitude of ac voltage in
detail. The threshold of the system parameters of the dynamical pull in is obtained by the Melnikov method. The 4th
Runge-Kutta and the point mapping methods are employed numerically to verify the effect of the amplitude of ac voltage
on the basin of attraction of pull in of the system. It is found that the increasing of dc bias voltage may cause the pull-in
phenomena, and the increasing of ac voltage may induce pull-in instability of the structure. Then the delayed position
feedback is applied to reduce the pull-in instability. The numerical results verify the effectiveness of the control approach.The paper provides some potential applications for the design of electrostatically actuated resonant MEMS sensors．

Key words

safe basin / MEMS / pull in / fractal / time delay / feedback

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Huilin Shang Yongpeng Wen. Pull-in Stability of an Electrostatically ActuatedMEMS Resonant Sensor and Its Control[J]. Journal of Vibration and Shock, 2013, 32(15): 8-13