Vibration analysis of a cracked micro-cantilever beam under electrostatic excitation

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Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (17) : 41-45.

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Vibration analysis of a cracked micro-cantilever beam under electrostatic excitation

Liu Sujuan, Qi Shuhao, Zhang Wenming,

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Abstract

Based on Euler-Bernoulli theory, the dynamics model and analysis method of a cracked micro-cantilever beam under the coupling action of nonlinear electrostatic force and squeeze film damping effect is proposed. The dynamics behavior of a cracked micro-cantilever beam structure is studied under the coupling action of nonlinear electrostatic force and squeeze film damping effect. The cracked beam model is established using the classical cracked beam theory consisting of dividing the cracked element into two segments connected by a rotational spring located at the cracked section. This model promotes a discontinuity in bending slope, which is proportional to the second derivative of the displacements. Results indicate that crack position and severity, nonlinear electrostatic force and squeeze film damping have important effects on the vibration performance of the beam structure. This study may be of interest for the design, performance improvement, and health monitoring of micro-devices.

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micro-cantilever beam / electrostatic actuation / crack / vibration analysis

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Liu Sujuan;Qi Shuhao;Zhang Wenming;. Vibration analysis of a cracked micro-cantilever beam under electrostatic excitation[J]. Journal of Vibration and Shock, 2013, 32(17): 41-45