Design and Testing of a Double T-shape MEMS Bionic Vector Hydrophone

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Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (2) : 129-134.

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Design and Testing of a Double T-shape MEMS Bionic Vector Hydrophone

LIU Linxian1,2，ZHANG Guojun 1,2, XU Jiao1 ,ZHANG Wendong 1,2

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Abstract

In view of the Sonar System demand, a novel double T-shape vector hydrophone was proposed by means of the piezoresistive effect, bionic principle and MEMS technology. Based on the mechanical properties analysis of the T-shape beam, the design, simulation, fabrication and test of the double T-shaped vector hydrophone with two different sizes were described. The microstructure of the hydrophone was statically simulated by ANSYS, and the first-order resonance frequencies of the two microstructures were 1993.3Hz and 10.17 kHz respectively; The microstructure of the hydrophone was manufactured by MEMS technology and was encapsulated; The hydrophone was measured by vibrating table and underwater standing wave field. The test results show that the receiving sensitivity is up to -180dB and -192dB at 1 kHz (0dB 1V/μPa), dynamic range is 90.48 dB and the vector hydrophone possesses good “8” directional pattern.

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MEMS / bionic / vector hydrophone / double T-shaped / Ansys

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LIU Linxian;ZHANG Guojun;XU Jiao;ZHANG Wendong;. Design and Testing of a Double T-shape MEMS Bionic Vector Hydrophone[J]. Journal of Vibration and Shock, 2013, 32(2): 129-134