An Ultrasonic Linear Motor Based on both the H-shaped Vibrator’s Longitudinal mode and Bending mode

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Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (5) : 1-5.

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An Ultrasonic Linear Motor Based on both the H-shaped Vibrator’s Longitudinal mode and Bending mode

HE Hong-lin，WU Dong-mei，LIU Wen-guang

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Abstract

To develop theoretical instructions for design of high performance linear motor, a piezoelectric linear motor based on an H-shaped vibrator is presented, which employed the vibrator’s 2nd bending vibration mode and 1st longitudinal to drive the motor. Firstly, the motor’s working principle is proposed, and the generating of elliptical motions generated on the driving ends of the vibrator’s two longitudinal bars is described. Then, a FEM model is built for the vibrator so as to calculate the working modes and execute harmonic the response analysis and sensitivity analysis for the vibrator. Furthermore, the optimal size of the vibrator is given and the motor assembly structure is designed. Finally, modal test is done for the vibrator which validates that the vibrator is of the assumed work modes and shows that longitudinal vibration amplitude and the bending vibration amplitude of the vibrator’s driving end could reach 1.4μm and 1.2μm respectively. It is concluded that the vibrator could generate larger thrust and speed.

Key words

H-Shaped vibrator / ultrasonic linear motor / bending vibration mode / longitudinal vibration

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HE Hong-lin;WU Dong-mei;LIU Wen-guang. An Ultrasonic Linear Motor Based on both the H-shaped Vibrator’s Longitudinal mode and Bending mode [J]. Journal of Vibration and Shock, 2013, 32(5): 1-5