A novel multidirectional-sensitive MEMS inertial switch by non-silicon surface micromachining

ZHU Bin;YANG Zhuo-qing;CHEN Wen-guo;DING Gui-fu;ZHAO Xiao-lin

Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (5) : 104-107.

PDF(1837 KB)
PDF(1837 KB)
Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (5) : 104-107.
论文

A novel multidirectional-sensitive MEMS inertial switch by non-silicon surface micromachining

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 32(5): 104-107

References

List( Publishing order | Descend order by publishing year | Descend order by cited within ) Chart analysis

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(1837 KB)

Accesses

Citation

Detail
Sections
Recommended
Copyright © Journal of Vibration and Shock, All Rights Reserved.
Tel: 021-62821366　
E-mail：jvs@sjtu.edu.cn
Powered by Beijing Magtech Co. Ltd.

/

〈 〉