Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone

DU Min;LI Qiao-yan;XU Guo-dong

Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (9) : 84-89.

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PDF(1671 KB)
Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (9) : 84-89.
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Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone

  • DU Min 1,2,LI Qiao-yan 1,XU Guo-dong 1
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Abstract

A new-type seismic geophone, which integrating three MEMS accelerations and gyroscopes, is developed. It can provide linear acceleration, linear velocity, angular velocity, vibration displacement, and has greatly improved performance and efficiency. A new six-position rotation calibration scheme for the digital geophone is proposed which utilizes only a single axis turn-table without north reference. The experiment results show that the proposed method has improved the measurement precision, and verifies validity of the silicon MEMS geophone.

Key words

micro electro-mechanical system / geophone / accelerometer / gyroscope / error calibration

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DU Min;LI Qiao-yan;XU Guo-dong . Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone[J]. Journal of Vibration and Shock, 2013, 32(9): 84-89
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