
Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone
DU Min;LI Qiao-yan;XU Guo-dong
Journal of Vibration and Shock ›› 2013, Vol. 32 ›› Issue (9) : 84-89.
Design and Error Calibration of A Micro-Electro-Mechanical System Digital Geophone
A new-type seismic geophone, which integrating three MEMS accelerations and gyroscopes, is developed. It can provide linear acceleration, linear velocity, angular velocity, vibration displacement, and has greatly improved performance and efficiency. A new six-position rotation calibration scheme for the digital geophone is proposed which utilizes only a single axis turn-table without north reference. The experiment results show that the proposed method has improved the measurement precision, and verifies validity of the silicon MEMS geophone.
micro electro-mechanical system / geophone / accelerometer / gyroscope / error calibration {{custom_keyword}} /
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