Thermoelastic damping in MEMS torsion resonators with coupling effect between torsion and bending

TAI Yong-peng;LI Pu;ZUO Wan-li

Journal of Vibration and Shock ›› 2014, Vol. 33 ›› Issue (13) : 35-39.

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Journal of Vibration and Shock ›› 2014, Vol. 33 ›› Issue (13) : 35-39.
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Thermoelastic damping in MEMS torsion resonators with coupling effect between torsion and bending

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 33(13): 35-39

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