Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement

ZHANG Gong ;ZHANG Wei-ping;XU Zhong-xing;WANG Ying-hai;CHENG Yu-xiang;TANG Jian;GUAN Ran;CHEN Wenyuan

Journal of Vibration and Shock ›› 2014, Vol. 33 ›› Issue (19) : 104-108.

PDF(1353 KB)
PDF(1353 KB)
Journal of Vibration and Shock ›› 2014, Vol. 33 ›› Issue (19) : 104-108.
论文

Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement

  • ZHANG Gong 1 , ZHANG Wei-ping1, XU Zhong-xing1, WANG Ying-hai1, CHENG Yu-xiang1, TANG Jian1, GUAN Ran1, CHEN Wenyuan1
Author information +
History +

Abstract

In this paper, we focus on the new type of gyroscope with a completely symmetrical disk,based on out-of-plane degenerate mode of bulk acoustic wave, is aimed at detecting angular velocity by Coriolis effect.The device combines the bulk acoustic wave drive/sense and the rocking mass is designed to enhance the driving and sensing efficiency.The structure and working principle of the gyroscope are introduced and simulation and analysis are followed. By parameter optimization,it is concluded that this type of gyroscope with proper parameters can work at bulk acoustic wave model with double antinodes and it can also detect angular velocity.After simulation analysis, we obtain its operation frequency 25172.8Hz with small frequency split 184.6Hz and the sensitivity 1.81μV/rad/s is achieved. At last ,the sample micro gyroscope is fabricated.

Key words

piezoelectric / bulk acoustic wave / Coriolis effect / sensitivity

Cite this article

Download Citations
ZHANG Gong ;ZHANG Wei-ping;XU Zhong-xing;WANG Ying-hai;CHENG Yu-xiang;TANG Jian;GUAN Ran;CHEN Wenyuan. Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement[J]. Journal of Vibration and Shock, 2014, 33(19): 104-108
PDF(1353 KB)

517

Accesses

0

Citation

Detail

Sections
Recommended

/