Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement
ZHANG Gong ;ZHANG Wei-ping;XU Zhong-xing;WANG Ying-hai;CHENG Yu-xiang;TANG Jian;GUAN Ran;CHEN Wenyuan
Journal of Vibration and Shock ›› 2014, Vol. 33 ›› Issue (19) : 104-108.
Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement
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