Interaction between Exciting Base and Cantilever of Stacked Chip

PDF(1716 KB)

Journal of Vibration and Shock ›› 2014, Vol. 33 ›› Issue (22) : 97-100.

论文

Interaction between Exciting Base and Cantilever of Stacked Chip

LI Jin-jun HAN Lei

Author information +

History +

Abstract

A two-probe Laser Doppler Vibrometer(LDV) system is used for detecting the vibrations of the cantilever and the base. Compare the velocity spectrum curve of cantilever and base, acquire the dimensionless frequency response curve of the cantilever, and acquire the phase difference between the cantilever and the base, then accurately estimate the resonant frequency of the cantilever by observing the dimensionless frequency response curve and the phase difference. This paper analyzes the cantilever’s impact to the base when the cantilever is resonating, and the influence between the two cantilevers.