The Dynamics Characteristics Analysis of Micro-Mechanical-Resonator Under The Squeeze Film Damping

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Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (17) : 124-130.

ZHANG Qi-chang，ZHOU Fan-sen，WANG Wei

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Abstract

Electrostatic actuated micromechanical resonators are widely used in the chemical sensor and the sensor of biological species, which work in the air or liquid, as they take advantage of high frequency, low-power consumption and small size. The air damping of the surface effect and cubic nonlinear static electricity can significantly affect the dynamic response characteristics of the micromechanical resonator. In this paper, via squeeze-film damping theory, the effects of air damping due to ambient pressures during free vibration and cubic nonlinear electrostatic force on the patterns of movement and response performance were investigated in detail. The relationship between ambient pressure and nonlinear electrostatic force are found. It indicates that the resonance frequencies of micromechanical resonator will increase with the increase of the ambient pressure, while the vibration amplitudes and the drift of the resonance will decline with the increase of the ambient pressure. And it also indicates that cubic nonlinear electrostatic force will make MEMS resonators exhibit softening or hardening nonlinear characteristics and can not to be ignore by amplitude frequency curve for small amplitude vibration.

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micro-mechanical-resonator / squeeze film damping / ambient pressure

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ZHANG Qi-chang，ZHOU Fan-sen，WANG Wei. The Dynamics Characteristics Analysis of Micro-Mechanical-Resonator Under The Squeeze Film Damping[J]. Journal of Vibration and Shock, 2015, 34(17): 124-130

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