Position control for piezoelectric micro-positioning stage

CUI Yu-guo, ZHU Yao-xiang, MA Jian-qiang, FANG Fan

Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (17) : 63-68.

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Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (17) : 63-68.

Position control for piezoelectric micro-positioning stage

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 34(17): 63-68

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