Position control for piezoelectric micro-positioning stage

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Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (17) : 63-68.

CUI Yu-guo, ZHU Yao-xiang, MA Jian-qiang, FANG Fan

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Abstract

To achieve high positioning speed and high positioning accuracy for a piezoelectric micro-positioning stage, a compound position control method was investigated. A hysteresis model of the micro-positioning stage was established. The threshold value was optimized as far as possible by considering the accuracy of the model and the uniformity of the threshold interval changes. Then a feedforward controller based on the hysteresis model was developed. In order to depress the overshoot of the stage, a PID feedback controller based on the conventional digital incremental PID and a filter was also introduced. Further, a compound controller combining the feedforward controller with the PID feedback controller was developed. The experimental results show that: The developed model has only 7 effective operators. The maximum error is 0.208 μm for a maximum measured displacement of 16.3 μm. For the compound control, the response time of the micro-positioning stage for a 5 μm desired step is 0.173 s, which is slower than that for feedforward control, but significantly faster than that for PID feedback control. Regardless of the sensor noise, the position error of the stage is nearly zero under a maximum reference displacement of 17.155 μm.

Key words

Micro-positioning stage / Hysteresis model / Feedforward control / PID Feedback control / Compound control

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CUI Yu-guo, ZHU Yao-xiang, MA Jian-qiang, FANG Fan. Position control for piezoelectric micro-positioning stage[J]. Journal of Vibration and Shock, 2015, 34(17): 63-68

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