Displacement Resolution Research of Precision Stage Driving by Linear Ultrasonic Motors

WANG Jin-peng 1 ZHOU Hong-ping 1 SHI Yun-lai2

Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (22) : 178-182.

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Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (22) : 178-182.

Displacement Resolution Research of Precision Stage Driving by Linear Ultrasonic Motors

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 34(22): 178-182

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