Dynamical Modeling and Nonlinear Analysis of Microgyroscope

WEN Yong-peng SHANG Hui-lin

Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (4) : 69-73.

PDF(1536 KB)
PDF(1536 KB)
Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (4) : 69-73.
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Dynamical Modeling and Nonlinear Analysis of Microgyroscope

  • WEN Yong-peng 1 SHANG Hui-lin 2
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Abstract

This paper presents dynamics analysis model of microgyroscope, a multi-scale method is used to solve the nonlinear model of the microgyroscope. The influence of the output of the microgyroscope for the diving and the sensing spring beams is disscussed. The design principle of the bandwidth of micromachined gyroscope is studied considering the nonlinear stiffness. The results show that for the vibration system of microgyroscope, the detection sensitivity correlates negatively with the bandwidth. The input angular velocity has a nonlinear relationship with the detection output due to nonlinear stiffness of the mircromachined sping beams of the microgyroscope. Therefore, In the view of the design for the spring beams, the couple effects for the stiffness of the driving spring beam is relatively low, the appropriate spring beam can be selected according to the larger output or smaller nonlinear requirements. The stiffness of the sensing spring beam can be selected for a smaller nonlinear stiffness.

Key words

micro-electro-mechanical systems / mircrogyroscope / mircromachined spring beam / nonlinear stiffness

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WEN Yong-peng SHANG Hui-lin . Dynamical Modeling and Nonlinear Analysis of Microgyroscope[J]. Journal of Vibration and Shock, 2015, 34(4): 69-73
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