Design of the micro ultrasonic worktable and measure its micro amplitude

H.S. LIAN Z.N. GUO W. ZHANG J.F. HE R.C. HAN

Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (7) : 199-203.

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Journal of Vibration and Shock ›› 2015, Vol. 34 ›› Issue (7) : 199-203.

Design of the micro ultrasonic worktable and measure its micro amplitude

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 34(7): 199-203

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