Delayed position feedback control on suppressing pull-in instability of a typical electrostatically actuated microsensor

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Journal of Vibration and Shock ›› 2016, Vol. 35 ›› Issue (4) : 81-86.

Huilin Shang 1, Shufeng Song 1, Yongpeng Wen 2

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Abstract

For investigating pull in and pull-in instability of the microstructure under the electrostatical force, a typical single-freedom electrostatically actuated MEMS sensor is considered. The delayed position feedback is applied on DC bias voltage of the system. The conditions of system parameters for reducing pull-in instability of the microstructure are discussed. And the mechanism of the delayed feedback to improve pull-in stability is investigated in detail. The threshold of AC voltage amplitude for pull-in instability in the delayed controlled system is obtained by the Melnikov method. Basing on the evolution of safe basin of the controlled system with control parameters, the effect of delayed feedback on suppressing pull-in instability is verified quantitatively. It follows from the numerical results and the theoretical analysis that the delayed feedback can be effective in reducing pull-in instability of the electrostatically actuated MEMS structure under a positive feedback gain and a short delay.

Key words

safe basin / time delay / pull-in instability / MEMS / fractal

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Huilin Shang 1, Shufeng Song 1, Yongpeng Wen 2. Delayed position feedback control on suppressing pull-in instability of a typical electrostatically actuated microsensor[J]. Journal of Vibration and Shock, 2016, 35(4): 81-86

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