&nbsp; Multi-field coupled nonlinear vibration analysis of micro-films

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Journal of Vibration and Shock ›› 2017, Vol. 36 ›› Issue (23) : 51-57.

Multi-field coupled nonlinear vibration analysis of micro-films

FU Xiao-rui ，DANG Ya-hui ， XU Li-zhong

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Abstract

Here, dynamic equations of a multi-field coupled micro-film were deduced considering the action of molecular forces. Utilizing Linz Ted-Poincaré method, the micro-film’s nonlinear natural frequencies and corresponding vibrational shape equation were derived. The effects of molecular forces on the micro-film’s nonlinear natural frequencies and free vibration were analyzed. A resonant film was designed and manufactured using the micro-processing technique. The method of electrostatic excitation-capacitance detection was used to measure the micro film’s nonlinear natural frequencies. The results showed that the smaller the size of the micro-film, the larger the effects of molecular forces on the micro-film’s nonlinear natural frequencies. The study results had a guiding significance for the further miniaturization of pressure sensors.

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molecular force / multi-field coupled / nonlinear vibration / MEMS

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FU Xiao-rui,DANG Ya-hui,XU Li-zhong. Multi-field coupled nonlinear vibration analysis of micro-films[J]. Journal of Vibration and Shock, 2017, 36(23): 51-57

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