Design of longitudinal bending compound mode ultrasonic elliptical vibration-assisted fiber array polishing system

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Journal of Vibration and Shock ›› 2017, Vol. 36 ›› Issue (24) : 242-249.

CHEN Tao 1,2 LIU De–fu 1,2 YAN Ri-ming1 YU Qing1

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Abstract

Conventional chemical mechanical polishing process is hard to meet requirements of high quality and high efficiency for fiber array components polishing. Based on basic eqrations for rods’ longitudinal vibration and bending vibration, a longitudinal-bending compound mode ultrasonic elliptical vibration device was designed to conduct ultrasonic elliptical vibration-assisted chemical mechanical polishing fiber array components to improve the polishing quality and polishing efficiency of fiber array component end faces. The designed longitudinal-bending compound mode ultrasonic elliptical vibration system realized a compound mode ultrasonic vibration at the same frequency of 36kHz with a longitudinal 4th mode and a bending 13th mode. The polishing test results showed that the two-direction amplitudes of the realized ultrasonic elliptical vibration are 3μm in longitudinal direction and 2.5μm in lateral direction, the roughness of the polished end face of fiber array components reaches 27.58nm.

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ultrasonic elliptical vibration / fiber array / FEA / impedance / chemical mechanical polishing

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CHEN Tao 1,2 LIU De–fu 1,2 YAN Ri-ming1 YU Qing1. Design of longitudinal bending compound mode ultrasonic elliptical vibration-assisted fiber array polishing system[J]. Journal of Vibration and Shock, 2017, 36(24): 242-249

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