Static and dynamic characteristics of MEMS comb resonators considering fringe effect

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Journal of Vibration and Shock ›› 2018, Vol. 37 ›› Issue (13) : 71-77.

ZHANG Qi-chang 1 MA He-chong 1 CHEN Tao 2 LI Lei 1

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Abstract

Micro-electro-mechanical systems (MEMS) comb resonator is a micro mechanical & electronic component with high precision and widely applied in aerospace, precision measurement, national defense and military, communications and other fields. Its static and dynamic characteristics receive more and more attentions. Due to the particularity of comb structure, the fringe effect of its electrostatic force is very strong. Here, a MEMS comb resonator’s electrostatic force model considering the fringe effect was fitted with the least-squares method. The influence of fringe effect on the dynamic characteristics of a MEMS comb resonator was analyzed. The system’s lateral stability and resonance frequency were explored. The criterion to distinguish the hard character from the soft one was defined. Moreover, two explicit formulas to describe the optimal DC voltage and the equivalent natural frequency when a linear-like state appeared were deduced, respectively. The results showed that the model with the fringe effect causes a smaller stable region of the system compared to the traditional model, the latter over-estimates the stability of a MEMS comb resonator; the fringe effect also causes decrease in the system natural frequency and the transient voltage from hard character to soft one, and enhancement of softening behavior; with increase in the initial spacing of the comb, the designed optimal system voltage increases gradually, while the corresponding resonance frequency decreases.

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comb / fringe effect / least-squares fitting / stability

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ZHANG Qi-chang 1 MA He-chong 1 CHEN Tao 2 LI Lei 1. Static and dynamic characteristics of MEMS comb resonators considering fringe effect[J]. Journal of Vibration and Shock, 2018, 37(13): 71-77

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