Static and dynamic characteristics of MEMS comb resonators considering fringe effect

ZHANG Qi-chang 1 MA He-chong 1 CHEN Tao 2 LI Lei 1

Journal of Vibration and Shock ›› 2018, Vol. 37 ›› Issue (13) : 71-77.

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Journal of Vibration and Shock ›› 2018, Vol. 37 ›› Issue (13) : 71-77.

Static and dynamic characteristics of MEMS comb resonators considering fringe effect

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 37(13): 71-77

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