Complex dynamics of the vibrating system of a micro mechanical resonator with electrostatic forces on both sides

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Journal of Vibration and Shock ›› 2018, Vol. 37 ›› Issue (24) : 18-23.

SHANG Huilin1,HU Lili1,WEN Yongpeng2

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Abstract

A class of micro mechanical resonator with electrostatic forces on both sides was considered whose complex dynamical behaviors were studied by the theories of bifurcations.It followed from the static bifurcation of the dynamical system that the increase of bias DC voltage would induce the static pull in of the microstructure.Basing on it, the obtained theoretical multiple periodic solutions were in agreement of the numerical results, which show that the safe jump phenomenon meant the multiple periodic solutions that caused by the losing stability of the two equilibriums.In addition, it was found that the increase of AC voltage would lead to the chaotic motion and pull-in instability.The investigation above may be helpful for preventing the complex dynamics, which can be applied to design the electrostatic micro resonators. 

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Micro resonator / Multi-stability / pull-in instability / chaos

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SHANG Huilin1,HU Lili1,WEN Yongpeng2. Complex dynamics of the vibrating system of a micro mechanical resonator with electrostatic forces on both sides[J]. Journal of Vibration and Shock, 2018, 37(24): 18-23

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