Formation mechanism of micro-vibration in aerostatic bearings

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Journal of Vibration and Shock ›› 2018, Vol. 37 ›› Issue (5) : 71-78.

PEI Hao, LONG Wei, YANG Shao-hua, GONG Ling

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Abstract

In order to further improve working accuracy and stability of an air bearing, gas flow state and heat transfer characteristics of its inlet region were analyzed according to the impinging jet theory, the flow field of gas supply hole was divided into four parts including free jet zone, stagnation one, transition one and outlet wall jet one. Based on the two-dimensional planar flow function and the large eddy simulation method, it was determined that micro-vibration of gas film is caused due to three typical cyclonic forms in the inlet region including main cyclone near gas supply hole, sub-cyclone inside gas cavity and additional one at gas film inlet. The evolution mechanism, development law and varying trend of the three cyclones were clarified with the gas molecular motion theory combined with the surface-interface physical method. At the same time, relations among pressure change in gas film, 4 zones’ positions and ranges were studied, location and intensity of pressure fluctuation in gas film were analyzed. At last, vibration amplitude variation and frequency response function of gas film were measured on a test rig to verify the existence and distribution of the three cyclones, and the reasonableness of gas supply hole flow field partition. The influence factors and laws of gas film micro-vibration intensity were also given with the combination of numerical computation and test data.

Key words

air bearing / micro-vibration / cyclone / impinging jet / large eddy simulation

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PEI Hao, LONG Wei, YANG Shao-hua, GONG Ling. Formation mechanism of micro-vibration in aerostatic bearings[J]. Journal of Vibration and Shock, 2018, 37(5): 71-78

References

[1] SHINNO H, HASHIZUME H, YOSHl0KA H, et al. X-Y-0-Nano-positioning table system for a motor machine[J].Annals of the CIRP,2004,53(1): 337-340
[2] 张景和,张顺国,赵海潇,等.大型超精密机床导轨卸荷系统结构设计与测试[J].光学精密工程, 2007,15(9):1382-1390
ZHANG Jing-he,ZHANG Shun-guo,ZHAO Hai-xia. Structure design and test for guide unloading system of large ultra-precision machine[J]. Optics and Precision Engineering, 2007, 15(9):1382-1390
[3] 黄海,孟光. 考虑二阶滑移流效应的微型气浮轴承-转子稳定性分析及其动态响应[J].振动与冲击，2008,27(5):112-114,124
HUANG Hai,MENGGuang.Stability and Dynamical Response of a Micro Rotor System Supported by Micro Gas Bearings in Consideration of the Second-Order Slip Flow Effect[J]. Journal of Vibration and Shock,2008,27(5):112-114,124
[4]梁峰,包日东.微尺度输流管道考虑热效应的流固耦合振动分析[J].振动与冲击，2015,34(5):141-144
LIANG Feng;BAORi-dong.Fluid-structure interaction of microtubes conveying fluid considering thermal effect[J].Journal of Vibration and Shock,2015,34(5):141-144
[5] BELFORTE G, RAPARELLI T, VIKTOROVV. Discharge coefficients of orifice-type restrictor for aerostatic bearings[J]. Tribology International, 2007, 40(3): 512-521.
[6] AOYAMA T, KAKINUMA Y, KOBAYASHI Y. Numerical and experimental analysis for the small vibration of aerostatic guideways[J].Annals of the CIRP, 2006, 55(1): 419-422.
[7] AOYAMA T, KOIZUMI K, KAKIMUMA Y, et al. Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores[J]. CIRP Annals-Manufacturing Technology, 2009, 58(1): 367-370.
[8] SAWADA K, KAWAI T, EBIHARA K, et al. Improvement of air bearing performance by means of laminarization and its application to ultraprecision micromachining[C]. Proceeding of the Euspen Int. Topical Conference, May 19-20,2003, Aachen University, Aachen, 2003: 61-64.
[9]CHEN Xuedong, HE Xueming. The effect of the recess shape on performance analysis of the gas lubricated bearing in opticallithography[J].Tribology International,2006,39(11): 1336-1341.
[10]张山,王雷.基于腹底式被动阻尼器抑制精密气浮工作台的定位噪声[J].光学精密工程,2012,20(12):2706-2711
   ZHANG Shan, WANG Lei. Suppression of positioning noise of precision air bearing stage based on abdominal and passive damper[J]. Optics and Precision Engineering,2012, 20(12): 2706-2711
[11]王贵林,李圣怡,粟时平.基于超精密应用的高刚度高阻尼空气静压导轨研究[J].航空精密制造技术,2001,37(6):1-5
    WANG Guilin, Li Shengyi, Su Shiping. A Study on Aerostatic Slider with High Stiffnessand High Damping for Ultraprecision Applications[J]. Aviation Precision Manufacturing Technology, 2001,37(6):1-5
[12]张鸣,朱煜,段广洪.超精密气浮工件台的微振动及其抑制[J].制造技术与机床,2005,(11):47-49
    ZHANG Ming, ZHU Yu, DUAN Guanghong. Micro-vibration of Ultra-precision Gas Bearing Linear Motion Stage and Its Elimination[J]. MANUFACTURING TECHNOLOGY & MACHINE TOOL, 2005,(11):47-49
[13]向洋,陈瀚,陈学东. 周期分布压力腔的小孔节流圆形静压气体轴承静动态特性研究[J].武汉理工大学学报,2012,34(2):115-120
    XIANG Yang,CHENHan,CHENXue-dong. Study of Static and Dynamic Characteristics of a Circular Aerostatic Bearing with Periodic Orifice Restrictors and Feed Pockets[J]. Journal of Wuhan University of Technology, 2012,34(2):115-120
[14] SAWADA K,KAWAI T,EBIHARA K,et a1.Improvement of air bearing performance by means of laminarization and its application to ultra-precision micromachining[J].Proceedingsof the Euspen Topical Conference,2003,Aachen:61-64
[15] YOSHIMOTO S.Aerostatic thrust bearing with a self-controlled restrictor employing a floating disk[J]. JSME International Journal Series C,1994,37(2):369 375．
[16]朱襟成. 气浮支承动态特性及其微振动研究[D].武汉:华中科技大学,2014
    Zhu Jin Cheng. Research on Dynamic Characteristics and Micro - vibration of Air Bearing[D]. Wuhan: Huazhong University of Science and Technology, 2014
[17]陈东菊,边艳华,周帅. 空气静压导轨气膜波动主要影响因素分析[J]. 机械工程学报, 2014,15:97-103.
    CHEN Dongju;BIANYanhua;ZHOUShuai.Influence Factor Analysis for Gas Fluctuation of Aerostatic Guideway[J]. Journal of Mechanical Engineering, 2014,15:97-103.
[18] 叶燚玺. 超精密运动平台中气浮支承振动特性的研究[D]. 武汉:华中科技大学, 2010.
    Ye Yuxi. Study on Vibration Characteristics of Air Bearing in Ultra - precision Motion Platform[D]. Wuhan: Huazhong University of Science and Technology, 2010
[19] 董志勇. 冲击射流[M].北京:海洋出版社, 1997:58-62
    Dong Zhiyong. Impinging jet[M]. Beijing: Ocean Press, 1997:58-62