Multi-field coupled nonlinear vibration analysis of micro resonant gas sensors

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Journal of Vibration and Shock ›› 2019, Vol. 38 ›› Issue (2) : 75-81.

FU Xiaorui，DANG Yahui，XU Lizhong

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Abstract

With the decrease of resonator size,the effects of molecular force etc.on the resonator behaviors become more obvious.The resonator of micro gas sensors usually operates in an environment of multi-field coupled interaction.In consideration of the factors of molecular force,thermal stress and density of gas,a multi-field coupled dynamic equation of the resonator was derived.Using the multi-scale method,the natural frequency and instant frequency of the sensor were obtained.The changes of the natural frequency of the sensor along with the variations of molecular force,gas density and temperature were investigated,the influences of system parameters on the time domain dynamic responses were analyzed.With a self-manufactured micro resonant gas sensor and its detecting system,the natural frequency was tested,which is in agreement with the calculated value.The correctness of the theoretical analysis was thus validated.The research results have guiding significance for the further miniaturization of such sensors.

Key words

molecular force / Multi-field coupled / nonlinear vibration / micro-electro-mechanical system（MEMS）

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FU Xiaorui，DANG Yahui，XU Lizhong. Multi-field coupled nonlinear vibration analysis of micro resonant gas sensors[J]. Journal of Vibration and Shock, 2019, 38(2): 75-81

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