Influences of angular deviation on response characteristic of a MEMS Gyroscope System

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Journal of Vibration and Shock ›› 2019, Vol. 38 ›› Issue (7) : 65-70.

ZHANG Lijuan1,LI Xinye1,ZHANG Huabiao2

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Abstract

The manufacturing error’s existence of a MEMS gyro sensitive structure makes that its elastic principal axis and its driving/sensitive axis can’t completely coincide to cause its signals with errors. Here,the effects of angular deviation caused by manufacturing error,i.e.,the inconsistency of the two axes mentioned above on response characteristics of the micro-gyro system were studied. Considering both stiffness nonlinearity of the system and angular deviation between the two axes,the system’s dynamic equations were established using Lagrange equation and solved with the averaging method to deduce the algebraic equation for the system’s steady solution. The homotopy continuation method was used to study effects of angular deviation on system zero bias,mechanical sensitivity and nonlinearity. It was shown that when there is only one angular deviation,with increase in absolute value of deviation angle,zero bias and nonlinearity increase,while mechanical sensitivity decreases; when there are two angular deviations in both driving direction and sensitive one,if both deviation angles are opposite,zero bias,mechanical sensitivity and nonlinearity change very acutely with variation of deviation angles’ magnitude,if both deviation angles are close to each other,the effect of deviation angles’ magnitude is more gentle; when zero bias and nonlinearity are the minimum and mechanical sensitivity are the maximum,the relation curve between two deviation angles is derived to provide a theoretical basis for modification of MEMS gyro sensitive structures in engineering.

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ZHANG Lijuan1,LI Xinye1,ZHANG Huabiao2. Influences of angular deviation on response characteristic of a MEMS Gyroscope System[J]. Journal of Vibration and Shock, 2019, 38(7): 65-70

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