Study on the influence of squeeze-film damping on the vibration characteristics of atomic force microscopy

LIU Shihua, WEI Zheng, SUN Yan, LIU Yunhong

Journal of Vibration and Shock ›› 2020, Vol. 39 ›› Issue (11) : 177-183.

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Journal of Vibration and Shock ›› 2020, Vol. 39 ›› Issue (11) : 177-183.

Study on the influence of squeeze-film damping on the vibration characteristics of atomic force microscopy

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 39(11): 177-183

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