Influence of flexible boundary and fringing field on the nonlinear dynamic performance of electrostatic microbeam resonators

CHANG Yunxia1,2，ZHANG Qichang1，HAN Jianxin3

Journal of Vibration and Shock ›› 2020, Vol. 39 ›› Issue (18) : 125-131.

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Journal of Vibration and Shock ›› 2020, Vol. 39 ›› Issue (18) : 125-131.

Influence of flexible boundary and fringing field on the nonlinear dynamic performance of electrostatic microbeam resonators

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 39(18): 125-131

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