Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopes

HAO Shuying1,2,3,LI Weixiong1,2,3,LI Huijie1,2,3,ZHANG Qichang4,5,FENG Jingjing1,2,3,ZHANG Kunpeng1,2,3

PDF(1377 KB)

Journal of Vibration and Shock ›› 2020, Vol. 39 ›› Issue (8) : 136-142.

Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopes

Author information +

History +

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 39(8): 136-142

List( Publishing order | Descend order by publishing year | Descend order by cited within ) Chart analysis

PDF(1377 KB)

Accesses

Citation

Detail

Sections

Recommended