Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopes

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Journal of Vibration and Shock ›› 2020, Vol. 39 ›› Issue (8) : 136-142.

HAO Shuying1,2,3,LI Weixiong1,2,3,LI Huijie1,2,3,ZHANG Qichang4,5,FENG Jingjing1,2,3,ZHANG Kunpeng1,2,3

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Abstract:To avoid the influence of electrostatic forces nonlinearity，this article applied the offset of nonlinearity at high voltage and microbeam geometrical nonlinearity to achieve high stability and sensitivity in micro gyroscope’s design.Moreover, The regularities of structural parameters on the dynamic performance of the dual-detection micro-gyro were simultaneously investigated when the nonlinearity of the electrostatic force and the stiffness-cubic nonlinearity both existed under the edge effect.It was shown that the smaller comb-finger non-overlapping length and the greater the DC bias voltages, the greater resonance frequency offsets and the more obvious the effect of electrostatic force softening will be produced.There is a threshold value for non-overlapping length of comb-fingers.Above this value, the nonlinearity weakens to zero and the effect on the amplitude is saturated.This feature could maintain sensitivity’s stability of the double sense-mode micro gyroscope.The softening characteristics from the electrostatic force are balanced by microbeam’s geometrically nonlinear design and the adjustment of hardening characteristics caused by stiffness nonlinearity.The amplitude-frequency curve shows an ideal linear state.The phenomenon of frequency instability and amplitude jump caused by the hardening and softening of electrostatic force is avoided, and the micro-gyro has higher sensitivity and stability.

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edge effect / electrostatic force nonlinearity / stiffness cubic nonlinearity / double sense-mode micro gyroscope / sensitivity

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HAO Shuying1,2,3,LI Weixiong1,2,3,LI Huijie1,2,3,ZHANG Qichang4,5,FENG Jingjing1,2,3,ZHANG Kunpeng1,2,3. Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopes[J]. Journal of Vibration and Shock, 2020, 39(8): 136-142

References

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