Effects of axial pretension on the detecting accuracy and thermoelastic damping of micro-beam resonant mass sensors

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Journal of Vibration and Shock ›› 2020, Vol. 39 ›› Issue (9) : 112-117.

CHEN Siyu, GUO Fenglin

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Abstract

An analytical study was carried out on the evaluation of mass sensitivity, thermoelastic damping and minimum detectable mass for resonant mass sensors of bridge configuration with axial pretension.Explicit expressions for mass sensitivity, thermoelastic damping and minimum detectable mass were derived.Proposed models were applied to examine the effect of axial pretension on the performance of mass sensors.The results of the presented study demonstrate that better device performances can be achieved by axial pretension, i.e., the presence of tensile axial stress could improve mass sensitivity, increase quality factor, and enable the mass sensor to detect ever smaller mass.

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micromechanical mass sensor / axial pretension / mass sensitivity / thermoelastic damping / minimum detectable mass

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CHEN Siyu, GUO Fenglin. Effects of axial pretension on the detecting accuracy and thermoelastic damping of micro-beam resonant mass sensors[J]. Journal of Vibration and Shock, 2020, 39(9): 112-117

References

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