In order to improve the structure performance of the grinding head of an internal gear forming grinding machine, the modal analysis and harmonic response analysis of the grinding head were carried out based on the finite element method.The first six modes and natural frequencies of the grinding head, as well as the stress response curve and displacement response curve of the grinding head were obtained.The response surface optimization analysis method was used to optimize the structure of the grinding wheel frame, and the optimal structure size was determined, so as to improve its performance.By observing vibration signals of the grinding head before and after optimization, it is found that the vibration acceleration of the optimized grinding head structure under the same grinding condition is smaller than that before optimization.It is proved that the optimized grinding head structure performance has been improved and the effectiveness of the optimization design is also testified.