Simulation and experimental study on the impact resistance of honeycomb anti-shock MEMS stop structures

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Journal of Vibration and Shock ›› 2021, Vol. 40 ›› Issue (18) : 80-85.

FENG Rui1,2，WANG Jiong2，YU Lei1，ZHENG Yu1，XIANG Yuan1，QIAO Wei1，WANG Fu1

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Abstract

In order to improve the shock resistance of MEMS devices, a honeycomb micro-electro-mechanical system(MEMS) stop structure was proposed, which has two layers of honeycomb holes with different apertures.A simplified mathematical model was established.It was shown that the elastic stiffness of the stop structure could be adjusted by changing the honeycomb apertures.A honeycomb MEMS stop structure based on a typical double-end fixed beam microstructure attached with an intermediate mass was designed.The shock simulation was developed by using ANSYS software.The mechanical impact table and Hopkinson bar were used to perform shock verification experiments on the fabricated structure.The experimental results indicate that the test structure with the honeycomb stop can withstand at least 32 000g impact.Compared with the elastic beam stop structure, the honeycomb stop avoids stress concentration and improves the impact resistance of the MEMS structure.

Key words

honeycomb / shock / micro-electro-mechanical system(MEMS) / stop structure

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FENG Rui，WANG Jiong，YU Lei，ZHENG Yu，XIANG Yuan，QIAO Wei，WANG Fu. Simulation and experimental study on the impact resistance of honeycomb anti-shock MEMS stop structures[J]. Journal of Vibration and Shock, 2021, 40(18): 80-85

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