Thermoelastic damping in hollow bilayered microbeam with circular cross-section

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Journal of Vibration and Shock ›› 2021, Vol. 40 ›› Issue (20) : 278-284.

LUO Zhijun1, LI Pu1, FANG Yuming2

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Abstract

The thermoelastic damping (TED) is the inherent energy loss mechanism in the thermal elastomer, which has an important influence on the quality factor of the micro resonators.An analytical model of thermoelastic damping was proposed for the hollow bilayered microbeam with circular cross-section in flexural vibration.Firstly, the temperature field function in the microbeam was obtained by the Green's function method, and the energy loss and the maximum elastic potential energy stored were calculated by the temperature field function, then the analytical model of TED in infinite series form was established.Secondly, the FEM model of microbeam was established to verify the validity of the present analytical model.In addition, compared with the Zener's model and the TR's model, it was found that when the present analytical model only retains the first term, the TED is consistent with the results of the Zener's model and the TR's model.Finally, the effect of metal coating and volume ratio on TED was discussed.The results show that: the metal coating can increase the TED; for the slender microbeam composed by SiC and Si, the peak value of the TED is constant when the volume ratio is constant, but the peak frequency will decrease with the increase of the volume of the microbeam.

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thermoelastic damping / bilayered microbeam / hollow structure

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LUO Zhijun, LI Pu, FANG Yuming. Thermoelastic damping in hollow bilayered microbeam with circular cross-section[J]. Journal of Vibration and Shock, 2021, 40(20): 278-284

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