Linear ultrasonic motor based on longitudinal-bending coupled modal standing wave excited by the shear vibration mode of PZT ceramics

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Journal of Vibration and Shock ›› 2021, Vol. 40 ›› Issue (22) : 121-127.

LU Danhong，LIN Qiuxiang，XU Jianqiao，JIANG Chunrong，SUN Rui

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Abstract

Based on the coupled vibration theory, a novel standing wave linear ultrasonic motor with eccentric structure is designed. Its working mode is a coupled vibration mode including the first longitudinal vibration component and the second bending vibration component. Different from the composite mode of longitudinal vibration mode and bending vibration mode, the working mode of the linear ultrasonic motor designed in this paper couples the two vibration components into the coupled mode of the stator by constructing the condition of the centroid deviation of the stator. The second bending vibration component of the stator is excited by the d15 mode of PZT ceramics at two ends of the elastomer, and the first longitudinal vibration component is simultaneously generated by coupling. The polarization of PZT ceramics working in d15 mode and power supply excitation scheme are designed. The working principle of the motor is described in detail. The structural parameters of the stator are designed by ANSYS, and the transient analysis of the stator is carried out to obtain the trajectories of driving feet. A prototype is made, and the experimental system has been established to test the frequency characteristics, voltage characteristics and mechanical characteristics.

Key words

Linear ultrasonic motor / Coupled mode / d15 mode

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LU Danhong，LIN Qiuxiang，XU Jianqiao，JIANG Chunrong，SUN Rui. Linear ultrasonic motor based on longitudinal-bending coupled modal standing wave excited by the shear vibration mode of PZT ceramics[J]. Journal of Vibration and Shock, 2021, 40(22): 121-127

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