Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope

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Journal of Vibration and Shock ›› 2021, Vol. 40 ›› Issue (5) : 55-62.

ZHANG Lijuan1,2, ZHANG Huabiao3, LI Xinye1, WANG Yaxue1, YU Tao1

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Abstract

Carrier movement may cause measurement errors, and even make MEMS gyroscopes inoperable. The effect of carrier movement on the response of electrostatically actuated MEMS gyroscope is studied in this paper considering the nonlinear support stiffness and the detecting electrostatic force. From the governing differential equation, it is found that only the carrier acceleration may affect the response of the system. The periodic response of the system is obtained by the harmonic balance method and residue theorem. It is shown that the carrier acceleration in the driving direction can reduce the sensitivity of the system, while the acceleration in the detecting direction affects both sensitivity and zero bias. Zero bias is proportional to the magnitude of the acceleration in the detecting direction, and this proportional relationship is independent of the magnitude of the drive voltage. As the driving voltage is small, the acceleration of carrier in the detecting direction has little effect on the sensitivity and nonlinearity. However, when the driving voltage or the acceleration in the detecting direction is large, the sensitivity of the system decreases sharply, and the nonlinearity changes dramatically.

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ZHANG Lijuan1,2, ZHANG Huabiao3, LI Xinye1, WANG Yaxue1, YU Tao1. Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope[J]. Journal of Vibration and Shock, 2021, 40(5): 55-62

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