Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope

ZHANG Lijuan1,2, ZHANG Huabiao3, LI Xinye1, WANG Yaxue1, YU Tao1

Journal of Vibration and Shock ›› 2021, Vol. 40 ›› Issue (5) : 55-62.

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Journal of Vibration and Shock ›› 2021, Vol. 40 ›› Issue (5) : 55-62.

Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 40(5): 55-62

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