Effects of comb inclination angle on dynamic performance of multi-DOF micro-gyroscope

PDF(1909 KB)

Journal of Vibration and Shock ›› 2022, Vol. 41 ›› Issue (5) : 221-227.

ZHANG Kunpeng1,2,3, HAO Shuying1,2,3, SONG Yuhao1,2,3, ZHANG Qichang4,5, FENG Jingjing1,2,

Author information +

History +

Abstract

In order to reveal the influence of inclination angle of comb caused by etching errors on the dynamic performance of multi-degree-of-freedom micro-gyroscope, a kind of four degrees-of-freedom micro-gyroscope with electrostatically driven was taken as the research object. The influence of inclination of comb on the dynamic characteristics of micro-gyroscope under linear and electrostatic nonlinear conditions was analyzed. The results show that the inclination of comb can lead to the offset of resonance frequency and decrease of the sensitivity in the micro-gyroscope system, when the micro-gyroscope works in the linear system. However, it has little impact on the bandwidth. When working in a nonlinear system with electrostatic force, inclination angle of the comb has a hardening stiffness effect on the system. It can counteract the influence of electrostatic nonlinearity in a certain extent, and the hardening effect increases with the increase of comb inclination angle. After reaching the peak value, it decreases with the increase of etching error, that is, there is a optimal comb inclination angle to counteract the influence of electrostatic nonlinearity. This research provides a theoretical basis for controlling or making use of the influence of etching errors.

Key words

inclination angle of comb / multi-degree-of-freedom micro-gyroscope / electrostatic force nonlinearity / sensitivity / dynamic characteristics

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

ZHANG Kunpeng1,2,3, HAO Shuying1,2,3, SONG Yuhao1,2,3, ZHANG Qichang4,5, FENG Jingjing1,2,. Effects of comb inclination angle on dynamic performance of multi-DOF micro-gyroscope[J]. Journal of Vibration and Shock, 2022, 41(5): 221-227

References

[1] BOXENHORN B, G REIF P. A vibratory micromechanical gyroscope// In Proceedings of the Guidance, Navigation and Control Conference, Minneapolis, MN, USA, August, 1988: 4177.
[2] TATAR E, MUKHERJEE T, FEDDER G K. Nonlinearity tuning and its effects on the performance of a MEMS gyroscope[C]// Transducers-International Conference on Solid-state Sensors, Anchorage, Alaska, USA, 2015: 1133-1136.
[3] 郝淑英, 李伟雄, 李会杰, 等. 静电力非线性对双检测微陀螺谐振频率及灵敏度稳定性的影响[J]. 振动与冲击, 2020, 39(8): 136-142.
HAO Shuying, LI Weixiong, LI Huijie, et al. Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopest[J]. Journal of Vibration and Shock, 2020, 39(8): 136-142.
[4] MISRI I, HAREESH P, YANG S, et al. Microfabrication of bulk PZT transducers by dry film photolithography and micro powder blasting[J]. Journal of Micromechanics and Microengineering, 2012, 22(8):085017.
[5] HAREESH P, MISRI I, YANG S, et al. Transverse Interdigitated Electrode Actuation of Homogeneous Bulk PZT[J]. Journal of Micro electromechanical Systems, 2012, 21(6): 1513- 1518.
[6] LV B, Liu X, Yang Z, et al. Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections[J]. Microsystem Technologies, 2008, 14(6): 711-718.
[7] 董林玺, 车录锋, 王跃林. 梳齿的不平行对电容式微机械传感器可靠工作范围的影响[J]. 半导体学报, 2005, 26(2): 373-378
DONG Linxi, CHE Lufeng, WANG Yuelin, Effect of non-parallel combs of capacitive micro-sensor on reliable operation range[J]. Journal of Semiconductors, 2005, 26(2): 373-378.
[8] 董林玺, 孙玲玲, 车录锋, 等. 梳齿的不平行对电容式微机械传感器阶跃信号响应的影响[J]. 传感技术学报, 2005, 18(3):525-530.
DONG Linxi, SUN Lingling, CHE Lufeng, et al. Effect of non-parallel combs of the capacitive micro-sensor on the pulse signal response[J]. Journal of Sensors and Actuators, 2005, 18(3):525-530.
[9] GUO Z, ZHOU F, LE C, et al. Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator[J]. Microsystem technologies, 2011, 17(1):71-76.
[10] 董林玺, 楼进峰. 倾斜梳齿的MEMS电容式加速度传感器自我标定特性研究[J]. 传感技术学报, 2013(10): 1357-1363.
DONG Linxi, LOU Jinfeng. Study of Self-Calibration of MEMS Capacitive Accelerometer with Non-Parallel Combs[J], Journal of Sensors and Actuators, 2013(10):1357-1363.
[11] ZHONG Z Y, ZHANG W M, MENG G, et al. Inclination Effects on the Frequency Tuning of Comb-Driven Resonators[J]. Journal of Microelectromechanical Systems, 2013, 22(4):865-875.
[12] 郝淑英, 高芬, 冯晶晶, 等. 梳齿偏移对微梳状微谐振器固有频率的影响[C]// 第十五届全国非线性振动暨第十二届全国非线性动力学和运动稳定性学术会议, 湖南2015.
HAO Shuying, GAO Fen, FENG Jingjing, et al. Influence of comb offset on Natural frequencies of Micro Resonator with Micro combs [C]// 15th National nonlinear vibration and 12th National Conference on nonlinear Dynamics and Motion stability, Hunan, 2015.
[13] 郝淑英, 齐成坤, 罗昔柳, 等. 微机械陀螺的刻蚀误差特性分析[J]. 动力学与控制学报, 2017, 15(2):157-162.
HAO Shuying, QI Chengkun, LUO Xiliu, et al. Characteristic analysis of etching error on micro mechanical gyroscope[J], Journal of Dynamics and Control, 2017, 15(2):157-162.
[14] Yan H, Bao J, Yu Q, et al. Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching[J]. Sensors and Materials, 2018, 30(11): 2747-2760.
[15] Wang W, LV X, SUN F. Design of micromachined vibratory gyroscope with two degree-of-freedom drive-mode and sense-mode[J]. IEEE Sensors Journal, 2012, 12(7): 2460-2464.
[16] TAY F E H, JUN X, LIANG Y C, et al. The effects of non-parallel plates in a differential capacitive microaccelerometer[J]. Journal of Micromechanics and Microengineering, 1999, 9(4):283-293.
[17] 仲作阳. 微机械谐振器的能量耗散机理与复杂动力学特性研究[D]. 上海交通大学, 2014.
ZHONG Zuoyang, Energy dissipation and complex dynamic behavior of micromechanical resonator[D], Shanghai Jiao Tong University, 2014.