Test study on surface residual stress of Si3N4 ceramic using LTUVAG

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Journal of Vibration and Shock ›› 2023, Vol. 42 ›› Issue (23) : 95-102.

YAN Yanyan,QIN Feiyue,ZHANG Yafei,MA Qianli,WANG Xiaobo

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Abstract

Si3N4 ceramic is a typical hard and brittle material, so it is easy to produce microcracks on the machined surface, which has a great impact on the service performance of ceramic parts. In order to obtain high-performance Si3N4 ceramic parts, longitudinal-torsional ultrasonic vibration assisted grinding(LTUVAG) is applied in its ultra-precision machining. The cutting trajectory equation of single abrasive grain during LTUVAG and the residual stress model of its machined surface were established to reveal the unique machining mechanism of LTUVAG for Si3N4 ceramic parts, and the longitudinal-torsional ultrasonic grinding test of Si3N4 ceramic was carried out to verify the theoretical model. The results show that, under the same processing parameters, the residual stress on the machined surface of Si3N4 ceramic under general grinding is mostly tensile stress, while the residual compressive stress on the surface of Si3N4 ceramic under LTUVAG is mostly residual stress, and the sub-surface damage depth of Si3N4 ceramic under LTUVAG can be reduced by up to 38% compared with that under general grinding, and the error between the theoretical simulation results and the experimental results is not more than 10%. As a result, LTUVAG can provide an effective machining method for ultra-precision machining of high performance Si3N4 ceramic parts.

Key words

longitudinal-torsional ultrasonic vibration assisted grinding(LTUVAG) / Si3N4 ceramic / Residual stress / Indentation stress field / Micro-crack

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YAN Yanyan,QIN Feiyue,ZHANG Yafei,MA Qianli,WANG Xiaobo. Test study on surface residual stress of Si3N4 ceramic using LTUVAG[J]. Journal of Vibration and Shock, 2023, 42(23): 95-102

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