Discussion on vibration parameters of the simplified dynamic model of an atomic force microscope

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Journal of Vibration and Shock ›› 2023, Vol. 42 ›› Issue (6) : 240-247.

BIN Fengjiao, GUAN Rui, LIU Guolin, ZENG Yu, WEI Zheng

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Abstract

Euler-Bernoulli beam model and one-dimensional spring oscillator model are the dynamic theoretical basis of atomic force microscope (AFM). In this paper, a new method for calculating the equivalent damping was proposed, and the equivalent mass, equivalent stiffness and equivalent damping simplified from Euler-Bernoulli beam model to one-dimensional spring vibrator model were calculated using two simplified methods: deflection curve function and first-order vibration mode function, and the two simplified methods were compared. On the basis of equivalent parameters, the response amplitude of cantilever beam excited with fixed end displacement was further discussed. Finally, the frequency sweep experiment of the needle free probe away from the sample was designed. The experimental results show that the theoretical results obtained by simplifying the first-order mode function are in good agreement with the experiment. The results provide a theoretical reference for the study of the kinetic properties of atomic force microscope.

Key words

atomic force microscope / spring vibrator / equivalent mass / equivalent damping

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BIN Fengjiao, GUAN Rui, LIU Guolin, ZENG Yu, WEI Zheng. Discussion on vibration parameters of the simplified dynamic model of an atomic force microscope[J]. Journal of Vibration and Shock, 2023, 42(6): 240-247

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