Vibration suppression of magnetic levitation molecular pump rotor

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Journal of Vibration and Shock ›› 2024, Vol. 43 ›› Issue (1) : 116-122.

YAO Runhui, ZHOU Jin, DING Song, ZHANG Yue, XU Yuanping

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Abstract

The magnetic levitation molecular pump has the characteristics of high working speed and large rotor pole rotational inertia. A new control method based on filtered cross-feedback and notch filter is proposed for the bending mode vibration and cone-motion mode vibration of the large inertia rotor of the magnetic levitation molecular pump during the speed-up process.The mathematical model of the magnetic bearing and the large inertia rigid rotor system is established, and the frequency of cone-motion mode vibration of the rotor is obtained. According to the model, the suppression effect of the filtered cross-feedback controller on the cone-motion mode vibration is analyzed, and a notch filter is designed to suppress the bending modal vibration of the rotor at different speeds. The experimental results show that the magnetic levitation molecular pump is stably increased to the working speed of 18000rpm, the vibration displacement of rotor is 35μm, and the bending mode vibration and the cone-motion mode vibration are effectively suppressed.

Key words

magnetic levitation molecular pump / filtered cross-feedback / notch filter / vibration suppression

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YAO Runhui, ZHOU Jin, DING Song, ZHANG Yue, XU Yuanping. Vibration suppression of magnetic levitation molecular pump rotor[J]. Journal of Vibration and Shock, 2024, 43(1): 116-122

References

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