A compound control method of hysteresis nonlinearity and dynamic behavior in piezo-based scanning systems

ZHANG Meng, LIU Yuwei, ZHANG Songlin, LIU Shicheng, FAN Pengju

Journal of Vibration and Shock ›› 2024, Vol. 43 ›› Issue (12) : 156-165.

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PDF(2876 KB)
Journal of Vibration and Shock ›› 2024, Vol. 43 ›› Issue (12) : 156-165.

A compound control method of hysteresis nonlinearity and dynamic behavior in piezo-based scanning systems

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 43(12): 156-165

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