A study on a low-frequency active vibration isolation platform based on quasi-zero stiffness supporting structures

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Journal of Vibration and Shock ›› 2024, Vol. 43 ›› Issue (16) : 84-91.

LI Qing1，HE Keda2,3，YANG Hongjie2,3，XUE Yujun2,3，MA Chao2,3，WANG Tianshu1，LIU Lei2,3

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Abstract

Aiming at the isolation requirements of sub-Hz micro-vibration of advanced applications such as quantum science experiments and precision manufacturing, low-frequency active vibration isolation technology based on quasi-zero stiffness supporting structures and non-contact voice coil actuators are studied. First, a low-frequency active vibration isolation platform design method is proposed, while the dynamic model of the platform is established by Newton-Euler method considering the equivalent dynamics of quasi-zero stiffness structure. Then, the disturbance transfer characteristics of the platform with multi-degree-of-freedom coupling are analyzed, the active vibration isolation control algorithm is designed and vibration isolation simulation is carried out. Finally, a low-frequency active vibration isolation platform is developed for experimental verification. The experimental results illustrate that the developed platform can achieve a micro-vibration suppression effect of better than 98.3% in three directions. In frequency range of 0.1-10Hz, the micro-vibration in the z-direction of the payload is less than 1.3×10-8g.

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low-frequency micro-vibration / active vibration isolation / quasi-zero stiffness / voice coil actuator

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LI Qing1, HE Keda2, 3, YANG Hongjie2, 3, XUE Yujun2, 3, MA Chao2, 3, WANG Tianshu1, LIU Lei2, 3. A study on a low-frequency active vibration isolation platform based on quasi-zero stiffness supporting structures[J]. Journal of Vibration and Shock, 2024, 43(16): 84-91

References

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